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Muto

Metal Parts

Metal Parts

五九集英代理銷售美國Muto Technology 之PVC, ETCH 等半導體相關耗材產品,致力於提供客戶最佳品質、具競爭力價格的產品以協助客戶達到節省成本、改良改善的效益。 已供應全球超過130 Fabs,為提供零件與服務的領先供應商。

OEM PN Part Description
0020-63124 300mm Cover Ring with Arc Spray
0020-27819 200mm Cover Ring
0240-20021 DC Bias/Clamp Ring Support Kit
0021-11747 200mm A101 Pedestal with Flat and Ears
0021-20106 200mm A101 Pedestal with Flat
0020-28937 200mm A101 Pedestal with Flat
0020-26588 200mm=8" Preclean Shield
0200-02863 DEP RING, 300MM SIP ENCORE TAN, CLEANCOAT
0020-24236 Antenna Spring Clip
0021-54083 Antenna Dowel
0020-22844 200mm=8" Preclean Pedestal Shield
0020-24531 Adapter Shield
0020-27190 200mm Upper Shield
0021-20114 200mm Upper Shield
0200-02677 12" Deposition Ring
0040-86514 300mm Lower Preclean Shield
0200-01903 300mm Insulator
0020-02348 300mm Sip Lower Shield Clamp
0020-45231 300mm Shutter with Arc Spray
0020-29711 300mm Lower Shield
0021-22177 300mm Cover Ring 
0021-24752 300mm Upper Shield
0020-24164 300mm Lower Shield with Side Holes Arc Spray
0020-28033 300mm Upper Shield with Arc Spray
0020-24166 300mm Cover Ring with Arc Spray
0040-51718 300mm Deposition Ring with Arc Spray
0020-29206 IMP Coil Support Bushing
0020-29306 IMP Feedthru Coil Support Outercup
0020-29143 IMP Coil Outer Cup Support
0021-22589 Captive Screw, IMP
3690-03177 8-32 x 1-1/4" SS SHCS, Silver Plated
3690-03970 8-32 x 1-1/8" SS SHCS, Silver Plated
0200-20169 IMP Insulator Coil Support
0200-20439 IMP Insulator Coil Support
0200-20175 IMP Labyrinth Rigid Coil Support
0200-20217 IMP Labyrinth Feedthru
0200-20215 Housing, Double RF Connectors, Vectra
0200-20170 IMP Coil Support Cap
0020-29975 Bar RF Connector. 12 Copper
0020-29974 Clamp Feedthru Coil Copper, Silver Plated
0021-22587 Nut, RF Connector 10-32, IMP
0200-01798 Lift Pin
0020-29344 200mm IMP Vectra Lower Shield 
0200-00299 Insulator Coil support 
0200-36631 Cover Plate, DXZ Patterned Heater
0200-10284 Lift Pin Ceramic
0020-25920 200mm Lower Shield
0020-23586 Adapter Shield
0020-28631 200mm Clamp Ring
0020-22510 200mm Clamp Ring 
0020-20113 DC Bias Assembly Hub
0020-23041 Clamp Shield
0020-27113 6' SMF calmp ring
0020-21462 Insulator Ceramic
0020-25744 shiled low 6 " g-12  101sst
0020-28420 PEDESTAL,6”AVD 101%, MAT:TI,HI-PWR
0020-28206 SHIELD, UPPER, 8” HI-PWR TTN, SCREWLESS 
0020-28205 COVER RING
0020-46072 COVER RING
0020-48628 300mm Edge Ring
0020-30678 150mm Clamp Ring 
0021-07905 200mm SIP Lower Shield  (CU Chamber)
0020-23044 200mm Lower Shield 
0020-23042 source adapter
0020-21665 Shield
0020-26823 150mm HTHU Lower Shield
0020-25059 CLAMP RING 6" AL SMF STRAIGHT FLAT
0020-26474 CLAMP RING  6 SMF AL FOUR PAD
0020-21468 CLAMP SHIELD 5 & 6"
3690-02569 SCR MACH FLT HD 6-32 X 1/2L SLOT TITAN
0020-21463 SHIELD AL/TI 6"
0020-24959 SHIELD AL/TI 6"
0015-20035 SCREW, INSULATOR
3690-02848 SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SST SLVR-PLT
3690-01869 SCR CAP SKT HD 4-40X1/4L HEX SKT SST SLVR-PLT
0020-29409 CONDUCTOR, FLEX DC BIAS
0020-20117 DC Bias Conducting Flex 
0020-20119 PAD DC BIAS
0020-21366 SCREW SHOULDER DC BIAS TIW
0020-20114 ISOLATOR, DC BIAS
0020-20126 STAND-OFF, CERAMIC DC BIAS 
3630-01091 RTNRRING EXT 3/4 SFT .062THKSST
3630-01092 RTNR RING INT 5/8 HSG .035THKSST
3880-01022 WSHRLKG SPLIT#4 .203OD X .120ID X .025THKSST 
3880-01004 WSHRFLAT #4 SST .031 THK
0020-26971 6" TI SHUTTER DISK
0020-28392 DISK 6" ADV 101 SHUTTER 
0020-22846 GAS TRENCH COVER
0200-20060 INSULATE
0200-20058 INSULATOR QTZ 6" JMF A PCII
0020-28938 PEDESTAL COVER 6" ADV 101 FULL COVERAGE 
0020-27122 PEDESTAL,PCII 6" JMF/SMF@A OR PCII W/CRYO
0020-26403 RING COVER 6" HTESC ALUM
0021-21900 RING DEPOSTION 150mm= 6" JMF ,9MM ALUM HTESC 
0020-26310 SHIELD  LOWER 6" CLMPD SPPRT LESS DURA
0020-24898 SHIELD 6" SST 101 AL
0020-26289 SHIELD LOWER 6" 101 DURA TTN
0020-22498 Upper Shield
0020-22499 200mm Lower Shield
0020-26547 200mm Clamp Ring with Tabs
0020-27702 200mm Clamp Ring, SNNF,3.4mm , 6 Pad
0021-01317 Outer Shield , TxZ 200MM 1
0200-20426 Non-antenna insulator
0200-02121 300mm RF feed thru insulator
0020-23043 SHILD TIN, UPPER 8 INCH WAFER
0020-23045 Lower Shield, 101% Tin Coverage
0020-24386 Cover Ring
0020-24365 Lower Shield
0021-16781 300mm SIP Upper Shield
0020-26374  300mm SIP Middle Shield Clamp
0020-08299 300mm SIP Middle Shield Clamp
0020-28207 SHIELD,LOWER,HI-PWR POIS TTN,A101,
0020-29015 RING,CLAMP RING.8"SNNF,SST,LOW ROOF,
0040-21528 COLLIMATOR,FOIL 5/8"HEX 1:1,SHAPED
0020-09716 Lift pin,
0021-15657 SHUTTER DISC MDP 300MM
0020-23278 Upper shield 
0020-23277 Lower shield
0021-20089 Upper Shield
0021-20090 Lower Shield
0200-00406 BUSHING, PREDESTAL RPC+
0020-26973 8” TI Shutter Disk
0020-20112 Ti Chamber Clamp Ring
0020-24913 101 pedestal 
0020-25731 Adapter Shiled
0020-28346 200mm clamp ring
0020-14847 Lower shield
0020-15016 Upper shield
0040-01549 Pedestal
0020-21900 200mm clamped lower shield (SS type)
0020-24614 SHIELD LOW KNEE AL/TI PRCS SST 6" WFR .2
0200-00624 RING PURGE 200MM WXZ+ NCSR
0020-22734 Honeycomb collimator 1/2 hex 
0020-23584 SHIELD UPPER 8" WAFER G-12
0020-27701 6" HTHU Clamp Ring
0020-22920 150mm=6" Preclean shield
0020-29348 IMP Feedthru Coil Support Outercup
0021-04229 8-32 X 1-1/8" Nitronic 60 Hex Socket Head Screw
0021-04230 8-32 X 1-1/4" Nitronic 60 Hex Socket Head Screw
3690-02977 6-32 x 5/16" SS SHCS, Silver Plated
3880-01166 #6 SS Flat Washer (.24" OD,.14" ID, .03" Thick)
3700-01170 2-388 Black Viton Target O-Ring, 300mm 
0200-20315 IMP Rest button (for B101 chamber type)
0020-27869 Pedestal  6" SMF
0020-06270 200mm SIP Inner Shield withArc Spray
0020-08673 200mm SIP Inner Shield withArc Spray
0020-27124 150mm Preclean Pedestal
0020-22909 150mm Preclean Pedestal Shield
0020-29202 Clamp ring SMF
0240-11789 KIT 101% REST BUTTONS TIN COATED
0020-22292 6" Lower Shield, AL
0020-22794 Upper Shield SST
0200-35486 PIN LIFT MOD 2
0020-42285 BLOCKER PLATE
0020-27116 SCREW
0020-26394 200mm Lower Shield with Arc Spray
0240-25480 A101 Hardware Kit
0020-29640 A101 Pedestal Rest Button
0020-26312 Upper Shield
0200-35611 Screw Lid Liner TxZ
0021-97309 DISK, SHUTTER, ESC, CENTER PIN, AL ARC SPRAY, ENDURA 2, 300MM
0020-02344 300mm SIP Lower Shield withArc Spray with Side Holes
0020-23549 300mm SIP Upper Shield with Arc Spray
0200-01389 300mm Deposition Ring
0021-17770 300mm Cover Ring with ArcSpray
0020-05810 IMP Copper Ring
0200-09450 Gas Feed Tube
0021-21234 SHIELD, UPPER HI-COND TIN LONG, 300MM PVD
0021-22064 COVER RING, TTN, 300MM PVD
0021-22065 SHIELD, LOWER HI-COND TTN, 300MM PVD
0040-07291 DEPOSITION RING ADV 101 300MM
0200-20492 INSULATOR, RCPT, RIGID SUPPORT, VECTRA-IMP ICE
0020-26216 SHIELD 6″ SST AL ARC 101 LOW KNEE
0240-20022 Shield Clamp Kits
0020-93157 CIP Encore Cover Ring
0020-21867 RF Bars
0020-27871 Clamp Ring Screw
0200-39140 Cersmic Ring, Focus, 200mm SEMI NOTCH DPS METAL
0020-23587 SPACER MODIF SHIELD 8"G-12
0020-05389 lift Pin
0040-06127 Shield Insert Inner, new
0021-03980 Outer shield w/o window  
0020-54777 Inner shield with arc spray
0020-02345 Inner shield with blasted
0200-22583 Coil support Bushing
0021-22583 Coil support Bushing
0200-02262 Insulator coil support
0200-02145 Cap, EB coil support
0200-23799 12" RF Bar (Ni Plated)
0200-24423 Retainer plate
0040-04586 SHIELD INNER, TXZ CVD 300MM
0200-02421 ISOLATOR, LID TOP CERAMIC, TXZ 300MM
0200-01041 200mm cover ring Arc-spray (LP) (OEM-LP)
0020-22852 Shield 200mm
3880-01836 #8 Inconel Belleville Washer
0020-26822 200mm Lower Shield HTHU
0200-00590 Bushing Upper Shield Upper Insu, SIP, Ceramic
0200-36630 8" Cover Plate Heater, DXZ, Aluminum NIT
0020-44974 CUP, OUTER, .125 THK, EB COIL, 300MM SIP, CLEANCOAT
0020-44976 SHIELD, OUTER, 300MM, SIP ENCORE TA(N), CLEANCOAT /WITH OR NO ARC SPRAY
0020-63125 DEP RING, CLAMPED, CLEANCOAT, 300MM ESC
0021-16782 SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM
0020-83706 SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM
0020-85755 SHIELD, LOWER, NARROW NECK, SIP CU, 300MM
0021-16287 SHIELD, LOWER, NARROW NECK, SIP CU, 300MM
0200-04017 RING, DEPOSITION, NARROW OD, EXTENDED TRENCH, 300M
0200-20285 PEDESTAL COVER UPPER 8"B101 VECTRA-IMP CERAMIC
0200-20331 COVER RING 8" B101 CERAMIC, 10.75" OD
0200-36105 CERAMIC INSERT
0021-22311 SHIELD 13" SRC, 6" 101, SST
0200-20494 CAP, RIGID COIL SUPPORT, VECTRA-IMP ICE
0021-17725 SHUTTER DISK,SNNF ESC,200MM SIP TA(N),KACHINA 1100 RA TWAS,Ta PK,0021-17725 Ta
0020-19708 cover ring,200MM SIP TA(N),TI,KACHINA 1100 RA TWAS,Ta PK,0020-19708 Ta
0021-23331 SHIELD,OUTER,SIP II 200MM,Ta PK,0021-23331 Ta
0021-23332 SHIELD,UPPER,STRAIGHT,SIP II 200MM,Ta PK,0021-23332 Ta
0021-23330 SHIELD,INNER SBSEB3 SIP ENCORE TA(N),0021-23330  /200mm Encore Inner Shield
0021-20572 PEDESTAL,150mm=6" ADV.101 FULL CVRG (A101 pedestal)
0021-02469 TxZ pumping port-->Exhaust Liner Insert, TxZ
0021-24811 TxZ pumping port-->Exhaust Liner Insert, TxZ
0020-24962 SHIELD LOW KNEE AL/TI PRCS SST 200mm=8" WFR(screw hole side no b-blast)
0020-22647 Shield coherent upper 11.3''  (AL, arc spray)
0020-08677 Upper Gnd Shield
0020-08674 200mm SIP Lower Shield with Arc Spray
0020-25670 Shield, 200MM SRC  (shield is for 150mm wafers, clamped ring type lower shield)
0020-23396 Lower Shield, 200MM
0200-20437 Dep ring
0200-02114 Ceramic RF Housing
0020-25077 SHIELD LOWER 8" 101G-12 SST 
3690-01884 Clamp Screw, Shield, Inner,
300mm SIP Encore TA(N) 10-24 x 1/2" SHCS - Silver Coated (TKM Screw)
0020-24332 SCR CAP SKT HD 8-32X7/8"L HEX SKT NITRON
0020-23799 BAR, RF SBS, 300MM SIP ENCORE TA(N)
0020-22975 Insulator TiN 8" wafer = 200mm sourcing ring
0020-22982 G12 TiN source adapter, assy
0040-55456 BELLJAR, 21 OD 300MM PC XT/XTE
0021-04258 PLATE, RETAINER ALUMINUM
0021-07745 SCRCAP SKT HD 8-32X5/8"L TORX SKT NITRONIC 60
0021-07747 SCRW,CAPTIVE,RF FT,1/4"-20 TORX HD,VCTR IMP,300MM
3690-01085 SCRCAP SKT HD 6-32 X 3/8L HEX SKT SST
3690-01914 SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST SLVR PLT (Sliver coated)
0020-26583 6" Shutter Disk
0020-26589 150mm PCII shield
0020-24018 Pin Antenna
0020-24706 cover ring
0020-21893 Lower Shield
0020-26399 200mm Lower Shield(Blasted/Arc spray low profile/Arc spray high profile)
0020-26288 200mm Lower Shield (screw hole 4.1mm NO b-blasted type with 8 point height QC data)
0020-29431 CLAMP RING, 8 SNNF, SST, E/E 2.54MM
0020-03636  Vespel screw
0021-20788 SHIELD, 8", 101% AL COVERAGE, 200MM
0200-02420 200mm Dep ring
0021-15555 200mm dep Ring
0020-24804 200mm ESC Cover Ring
0020-27205 200mm hot al chamber clamp ring
0200-36638 SHIELD, 8" 200MM/200 mm quartz Blade
0021-16783 Cover Ring / COVER RING, NARROW POCKET, 300MM SIP CU, REV 2.0
0021-21444 200mm SiP Upper Shield
0021-18436 200mm Cover ring
0020-25730 200mm Upper Shield
0021-26609 Shutter Disc/SHUTTER DISK, A101, TTN, CENTER PIN, BLUE, 300MM
0021-20718 PEDESTAL COVER LOWER 8”B101 REV 2.1 SST
0021-20437 DISK 8”B101 TI SHUTTER
0020-29343 SHIELD CLAMP,DARKSPACE .727”TALL VECTRA-IMP
0040-21178 PRECLEAN II BELL JAR SERIALIZED
0040-20561 PRECLEAN II BELL JAR SERIALIZED
0200-00218 COVER TOP QUARTZ 8" PCII
0200-00221 INSULATOR, PINLESS 8" SNNF, PRECLEAN II
0020-24914 COVER RING
0010-21717 ASSY SHIELD 6" ADV-101 TIN VECTRA-IMP (no coil)
0020-06265 200mm Shield
0021-14847 200mm Shield
0021-21589 200mm Shield
0020-26254 Insulator
0020-23579 300mm Encore Lower Shield with Arc Spray
0020-29525 cup outer 
0021-06336 Shutter disc 
0200-02812 Dep ring 
0020-29345 150mm Imp Vectra lower shield
0020-02537 Lower SIP SHIELD 6"

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如您本次的訂單無退換貨狀況,您所購買的商品發票會在收到商品的七至十個工作天送達,敬請留意收件信箱。

收到商品後若有任何問題,請您於收到商品起算之四個工作天內,向客服人員連繫,並請在收到商品起算之七天內寄回,才能享有完善的售後服務。

如您本次的訂單無退換貨狀況,您所購買的商品發票會在收到商品的七至十個工作天送達,敬請留意收件信箱。