Muto
59Clean Technology is an authorized distributor for Muto Technology's semiconductor-related products, including PVD and Etch. Committed to delivering competitive prices, we aim to assist our customers in achieving cost savings and improvement benefits. With a track record of supplying over 130 fabs worldwide.
OEM PN | Part Description |
---|---|
0020-63124 | 300mm Cover Ring with Arc Spray |
0020-27819 | 200mm Cover Ring |
0240-20021 | DC Bias/Clamp Ring Support Kit |
0021-11747 | 200mm A101 Pedestal with Flat and Ears |
0021-20106 | 200mm A101 Pedestal with Flat |
0020-28937 | 200mm A101 Pedestal with Flat |
0020-26588 | 200mm=8" Preclean Shield |
0200-02863 | DEP RING, 300MM SIP ENCORE TAN, CLEANCOAT |
0020-24236 | Antenna Spring Clip |
0021-54083 | Antenna Dowel |
0020-22844 | 200mm=8" Preclean Pedestal Shield |
0020-24531 | Adapter Shield |
0020-27190 | 200mm Upper Shield |
0021-20114 | 200mm Upper Shield |
0200-02677 | 12" Deposition Ring |
0040-86514 | 300mm Lower Preclean Shield |
0200-01903 | 300mm Insulator |
0020-02348 | 300mm Sip Lower Shield Clamp |
0020-45231 | 300mm Shutter with Arc Spray |
0020-29711 | 300mm Lower Shield |
0021-22177 | 300mm Cover Ring |
0021-24752 | 300mm Upper Shield |
0020-24164 | 300mm Lower Shield with Side Holes Arc Spray |
0020-28033 | 300mm Upper Shield with Arc Spray |
0020-24166 | 300mm Cover Ring with Arc Spray |
0040-51718 | 300mm Deposition Ring with Arc Spray |
0020-29206 | IMP Coil Support Bushing |
0020-29306 | IMP Feedthru Coil Support Outercup |
0020-29143 | IMP Coil Outer Cup Support |
0021-22589 | Captive Screw, IMP |
3690-03177 | 8-32 x 1-1/4" SS SHCS, Silver Plated |
3690-03970 | 8-32 x 1-1/8" SS SHCS, Silver Plated |
0200-20169 | IMP Insulator Coil Support |
0200-20439 | IMP Insulator Coil Support |
0200-20175 | IMP Labyrinth Rigid Coil Support |
0200-20217 | IMP Labyrinth Feedthru |
0200-20215 | Housing, Double RF Connectors, Vectra |
0200-20170 | IMP Coil Support Cap |
0020-29975 | Bar RF Connector. 12 Copper |
0020-29974 | Clamp Feedthru Coil Copper, Silver Plated |
0021-22587 | Nut, RF Connector 10-32, IMP |
0200-01798 | Lift Pin |
0020-29344 | 200mm IMP Vectra Lower Shield |
0200-00299 | Insulator Coil support |
0200-36631 | Cover Plate, DXZ Patterned Heater |
0200-10284 | Lift Pin Ceramic |
0020-25920 | 200mm Lower Shield |
0020-23586 | Adapter Shield |
0020-28631 | 200mm Clamp Ring |
0020-22510 | 200mm Clamp Ring |
0020-20113 | DC Bias Assembly Hub |
0020-23041 | Clamp Shield |
0020-27113 | 6' SMF calmp ring |
0020-21462 | Insulator Ceramic |
0020-25744 | shiled low 6 " g-12 101sst |
0020-28420 | PEDESTAL,6”AVD 101%, MAT:TI,HI-PWR |
0020-28206 | SHIELD, UPPER, 8” HI-PWR TTN, SCREWLESS |
0020-28205 | COVER RING |
0020-46072 | COVER RING |
0020-48628 | 300mm Edge Ring |
0020-30678 | 150mm Clamp Ring |
0021-07905 | 200mm SIP Lower Shield (CU Chamber) |
0020-23044 | 200mm Lower Shield |
0020-23042 | source adapter |
0020-21665 | Shield |
0020-26823 | 150mm HTHU Lower Shield |
0020-25059 | CLAMP RING 6" AL SMF STRAIGHT FLAT |
0020-26474 | CLAMP RING 6 SMF AL FOUR PAD |
0020-21468 | CLAMP SHIELD 5 & 6" |
3690-02569 | SCR MACH FLT HD 6-32 X 1/2L SLOT TITAN |
0020-21463 | SHIELD AL/TI 6" |
0020-24959 | SHIELD AL/TI 6" |
0015-20035 | SCREW, INSULATOR |
3690-02848 | SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SST SLVR-PLT |
3690-01869 | SCR CAP SKT HD 4-40X1/4L HEX SKT SST SLVR-PLT |
0020-29409 | CONDUCTOR, FLEX DC BIAS |
0020-20117 | DC Bias Conducting Flex |
0020-20119 | PAD DC BIAS |
0020-21366 | SCREW SHOULDER DC BIAS TIW |
0020-20114 | ISOLATOR, DC BIAS |
0020-20126 | STAND-OFF, CERAMIC DC BIAS |
3630-01091 | RTNRRING EXT 3/4 SFT .062THKSST |
3630-01092 | RTNR RING INT 5/8 HSG .035THKSST |
3880-01022 | WSHRLKG SPLIT#4 .203OD X .120ID X .025THKSST |
3880-01004 | WSHRFLAT #4 SST .031 THK |
0020-26971 | 6" TI SHUTTER DISK |
0020-28392 | DISK 6" ADV 101 SHUTTER |
0020-22846 | GAS TRENCH COVER |
0200-20060 | INSULATE |
0200-20058 | INSULATOR QTZ 6" JMF A PCII |
0020-28938 | PEDESTAL COVER 6" ADV 101 FULL COVERAGE |
0020-27122 | PEDESTAL,PCII 6" JMF/SMF@A OR PCII W/CRYO |
0020-26403 | RING COVER 6" HTESC ALUM |
0021-21900 | RING DEPOSTION 150mm= 6" JMF ,9MM ALUM HTESC |
0020-26310 | SHIELD LOWER 6" CLMPD SPPRT LESS DURA |
0020-24898 | SHIELD 6" SST 101 AL |
0020-26289 | SHIELD LOWER 6" 101 DURA TTN |
0020-22498 | Upper Shield |
0020-22499 | 200mm Lower Shield |
0020-26547 | 200mm Clamp Ring with Tabs |
0020-27702 | 200mm Clamp Ring, SNNF,3.4mm , 6 Pad |
0021-01317 | Outer Shield , TxZ 200MM 1 |
0200-20426 | Non-antenna insulator |
0200-02121 | 300mm RF feed thru insulator |
0020-23043 | SHILD TIN, UPPER 8 INCH WAFER |
0020-23045 | Lower Shield, 101% Tin Coverage |
0020-24386 | Cover Ring |
0020-24365 | Lower Shield |
0021-16781 | 300mm SIP Upper Shield |
0020-26374 | 300mm SIP Middle Shield Clamp |
0020-08299 | 300mm SIP Middle Shield Clamp |
0020-28207 | SHIELD,LOWER,HI-PWR POIS TTN,A101, |
0020-29015 | RING,CLAMP RING.8"SNNF,SST,LOW ROOF, |
0040-21528 | COLLIMATOR,FOIL 5/8"HEX 1:1,SHAPED |
0020-09716 | Lift pin, |
0021-15657 | SHUTTER DISC MDP 300MM |
0020-23278 | Upper shield |
0020-23277 | Lower shield |
0021-20089 | Upper Shield |
0021-20090 | Lower Shield |
0200-00406 | BUSHING, PREDESTAL RPC+ |
0020-26973 | 8” TI Shutter Disk |
0020-20112 | Ti Chamber Clamp Ring |
0020-24913 | 101 pedestal |
0020-25731 | Adapter Shiled |
0020-28346 | 200mm clamp ring |
0020-14847 | Lower shield |
0020-15016 | Upper shield |
0040-01549 | Pedestal |
0020-21900 | 200mm clamped lower shield (SS type) |
0020-24614 | SHIELD LOW KNEE AL/TI PRCS SST 6" WFR .2 |
0200-00624 | RING PURGE 200MM WXZ+ NCSR |
0020-22734 | Honeycomb collimator 1/2 hex |
0020-23584 | SHIELD UPPER 8" WAFER G-12 |
0020-27701 | 6" HTHU Clamp Ring |
0020-22920 | 150mm=6" Preclean shield |
0020-29348 | IMP Feedthru Coil Support Outercup |
0021-04229 | 8-32 X 1-1/8" Nitronic 60 Hex Socket Head Screw |
0021-04230 | 8-32 X 1-1/4" Nitronic 60 Hex Socket Head Screw |
3690-02977 | 6-32 x 5/16" SS SHCS, Silver Plated |
3880-01166 | #6 SS Flat Washer (.24" OD,.14" ID, .03" Thick) |
3700-01170 | 2-388 Black Viton Target O-Ring, 300mm |
0200-20315 | IMP Rest button (for B101 chamber type) |
0020-27869 | Pedestal 6" SMF |
0020-06270 | 200mm SIP Inner Shield withArc Spray |
0020-08673 | 200mm SIP Inner Shield withArc Spray |
0020-27124 | 150mm Preclean Pedestal |
0020-22909 | 150mm Preclean Pedestal Shield |
0020-29202 | Clamp ring SMF |
0240-11789 | KIT 101% REST BUTTONS TIN COATED |
0020-22292 | 6" Lower Shield, AL |
0020-22794 | Upper Shield SST |
0200-35486 | PIN LIFT MOD 2 |
0020-42285 | BLOCKER PLATE |
0020-27116 | SCREW |
0020-26394 | 200mm Lower Shield with Arc Spray |
0240-25480 | A101 Hardware Kit |
0020-29640 | A101 Pedestal Rest Button |
0020-26312 | Upper Shield |
0200-35611 | Screw Lid Liner TxZ |
0021-97309 | DISK, SHUTTER, ESC, CENTER PIN, AL ARC SPRAY, ENDURA 2, 300MM |
0020-02344 | 300mm SIP Lower Shield withArc Spray with Side Holes |
0020-23549 | 300mm SIP Upper Shield with Arc Spray |
0200-01389 | 300mm Deposition Ring |
0021-17770 | 300mm Cover Ring with ArcSpray |
0020-05810 | IMP Copper Ring |
0200-09450 | Gas Feed Tube |
0021-21234 | SHIELD, UPPER HI-COND TIN LONG, 300MM PVD |
0021-22064 | COVER RING, TTN, 300MM PVD |
0021-22065 | SHIELD, LOWER HI-COND TTN, 300MM PVD |
0040-07291 | DEPOSITION RING ADV 101 300MM |
0200-20492 | INSULATOR, RCPT, RIGID SUPPORT, VECTRA-IMP ICE |
0020-26216 | SHIELD 6″ SST AL ARC 101 LOW KNEE |
0240-20022 | Shield Clamp Kits |
0020-93157 | CIP Encore Cover Ring |
0020-21867 | RF Bars |
0020-27871 | Clamp Ring Screw |
0200-39140 | Cersmic Ring, Focus, 200mm SEMI NOTCH DPS METAL |
0020-23587 | SPACER MODIF SHIELD 8"G-12 |
0020-05389 | lift Pin |
0040-06127 | Shield Insert Inner, new |
0021-03980 | Outer shield w/o window |
0020-54777 | Inner shield with arc spray |
0020-02345 | Inner shield with blasted |
0200-22583 | Coil support Bushing |
0021-22583 | Coil support Bushing |
0200-02262 | Insulator coil support |
0200-02145 | Cap, EB coil support |
0200-23799 | 12" RF Bar (Ni Plated) |
0200-24423 | Retainer plate |
0040-04586 | SHIELD INNER, TXZ CVD 300MM |
0200-02421 | ISOLATOR, LID TOP CERAMIC, TXZ 300MM |
0200-01041 | 200mm cover ring Arc-spray (LP) (OEM-LP) |
0020-22852 | Shield 200mm |
3880-01836 | #8 Inconel Belleville Washer |
0020-26822 | 200mm Lower Shield HTHU |
0200-00590 | Bushing Upper Shield Upper Insu, SIP, Ceramic |
0200-36630 | 8" Cover Plate Heater, DXZ, Aluminum NIT |
0020-44974 | CUP, OUTER, .125 THK, EB COIL, 300MM SIP, CLEANCOAT |
0020-44976 | SHIELD, OUTER, 300MM, SIP ENCORE TA(N), CLEANCOAT /WITH OR NO ARC SPRAY |
0020-63125 | DEP RING, CLAMPED, CLEANCOAT, 300MM ESC |
0021-16782 | SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM |
0020-83706 | SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM |
0020-85755 | SHIELD, LOWER, NARROW NECK, SIP CU, 300MM |
0021-16287 | SHIELD, LOWER, NARROW NECK, SIP CU, 300MM |
0200-04017 | RING, DEPOSITION, NARROW OD, EXTENDED TRENCH, 300M |
0200-20285 | PEDESTAL COVER UPPER 8"B101 VECTRA-IMP CERAMIC |
0200-20331 | COVER RING 8" B101 CERAMIC, 10.75" OD |
0200-36105 | CERAMIC INSERT |
0021-22311 | SHIELD 13" SRC, 6" 101, SST |
0200-20494 | CAP, RIGID COIL SUPPORT, VECTRA-IMP ICE |
0021-17725 | SHUTTER DISK,SNNF ESC,200MM SIP TA(N),KACHINA 1100 RA TWAS,Ta PK,0021-17725 Ta |
0020-19708 | cover ring,200MM SIP TA(N),TI,KACHINA 1100 RA TWAS,Ta PK,0020-19708 Ta |
0021-23331 | SHIELD,OUTER,SIP II 200MM,Ta PK,0021-23331 Ta |
0021-23332 | SHIELD,UPPER,STRAIGHT,SIP II 200MM,Ta PK,0021-23332 Ta |
0021-23330 | SHIELD,INNER SBSEB3 SIP ENCORE TA(N),0021-23330 /200mm Encore Inner Shield |
0021-20572 | PEDESTAL,150mm=6" ADV.101 FULL CVRG (A101 pedestal) |
0021-02469 | TxZ pumping port-->Exhaust Liner Insert, TxZ |
0021-24811 | TxZ pumping port-->Exhaust Liner Insert, TxZ |
0020-24962 | SHIELD LOW KNEE AL/TI PRCS SST 200mm=8" WFR(screw hole side no b-blast) |
0020-22647 | Shield coherent upper 11.3'' (AL, arc spray) |
0020-08677 | Upper Gnd Shield |
0020-08674 | 200mm SIP Lower Shield with Arc Spray |
0020-25670 | Shield, 200MM SRC (shield is for 150mm wafers, clamped ring type lower shield) |
0020-23396 | Lower Shield, 200MM |
0200-20437 | Dep ring |
0200-02114 | Ceramic RF Housing |
0020-25077 | SHIELD LOWER 8" 101G-12 SST |
3690-01884 | Clamp Screw, Shield, Inner, 300mm SIP Encore TA(N) 10-24 x 1/2" SHCS - Silver Coated (TKM Screw) |
0020-24332 | SCR CAP SKT HD 8-32X7/8"L HEX SKT NITRON |
0020-23799 | BAR, RF SBS, 300MM SIP ENCORE TA(N) |
0020-22975 | Insulator TiN 8" wafer = 200mm sourcing ring |
0020-22982 | G12 TiN source adapter, assy |
0040-55456 | BELLJAR, 21 OD 300MM PC XT/XTE |
0021-04258 | PLATE, RETAINER ALUMINUM |
0021-07745 | SCRCAP SKT HD 8-32X5/8"L TORX SKT NITRONIC 60 |
0021-07747 | SCRW,CAPTIVE,RF FT,1/4"-20 TORX HD,VCTR IMP,300MM |
3690-01085 | SCRCAP SKT HD 6-32 X 3/8L HEX SKT SST |
3690-01914 | SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST SLVRPLT (Sliver coated) |
0020-26583 | 6" Shutter Disk |
0020-26589 | 150mm PCII shield |
0020-24018 | Pin Antenna |
0020-24706 | cover ring |
0020-21893 | Lower Shield |
0020-26399 | 200mm Lower Shield(Blasted/Arc spray low profile/Arc spray high profile) |
0020-26288 | 200mm Lower Shield (screw hole 4.1mm NO b-blasted type with 8 point height QC data) |
0020-29431 | CLAMP RING, 8 SNNF, SST, E/E 2.54MM |
0020-03636 | Vespel screw |
0021-20788 | SHIELD, 8", 101% AL COVERAGE, 200MM |
0200-02420 | 200mm Dep ring |
0021-15555 | 200mm dep Ring |
0020-24804 | 200mm ESC Cover Ring |
0020-27205 | 200mm hot al chamber clamp ring |
0200-36638 | SHIELD, 8" 200MM/200 mm quartz Blade |
0021-16783 | Cover Ring / COVER RING, NARROW POCKET, 300MM SIP CU, REV 2.0 |
0021-21444 | 200mm SiP Upper Shield |
0021-18436 | 200mm Cover ring |
0020-25730 | 200mm Upper Shield |
0021-26609 | Shutter Disc/SHUTTER DISK, A101, TTN, CENTER PIN, BLUE, 300MM |
0021-20718 | PEDESTAL COVER LOWER 8”B101 REV 2.1 SST |
0021-20437 | DISK 8”B101 TI SHUTTER |
0020-29343 | SHIELD CLAMP,DARKSPACE .727”TALL VECTRA-IMP |
0040-21178 | PRECLEAN II BELL JAR SERIALIZED |
0040-20561 | PRECLEAN II BELL JAR SERIALIZED |
0200-00218 | COVER TOP QUARTZ 8" PCII |
0200-00221 | INSULATOR, PINLESS 8" SNNF, PRECLEAN II |
0020-24914 | COVER RING |
0010-21717 | ASSY SHIELD 6" ADV-101 TIN VECTRA-IMP (no coil) |
0020-06265 | 200mm Shield |
0021-14847 | 200mm Shield |
0021-21589 | 200mm Shield |
0020-26254 | Insulator |
0020-23579 | 300mm Encore Lower Shield with Arc Spray |
0020-29525 | cup outer |
0021-06336 | Shutter disc |
0200-02812 | Dep ring |
0020-29345 | 150mm Imp Vectra lower shield |
0020-02537 | Lower SIP SHIELD 6" |
Attachment download:
※ If you have any requirements, please contact our staff for more information.
[Shipping Description]
Within two days after receipt of the order (excluding the holidays), the Commissioner will confirm the order with your Union or SMS.
This product is non-DIY goods, 4 floor below the floor fee, 5 floor above each additional 200 yuan, no recovery services.
Delivery area: Taiwan Island, the outer island does not receive a single. Due to special restrictions (mountain, township, town, village), the stairs are too small to move upstairs and other factors, leading to the delivery, the company has the right to ship.
large furniture distribution is not easy, delivery time to 7 to 14 working days, before delivery logistics company will confirm with you delivery time.
Hualien area (except Hualien City), Taitung area, Pingtung (except Pingtung City) and some remote areas (mountain) area, you need to receive additional freight, travel less delivery of about 10 to 20 Working days, remote areas determined by the logistics company. (You can order the order, follow up by the commissioner and your offer)
To protect the work of the logistics staff, the seller does not provide hanging service, if the crane or other hanging way lifting, the cost will be paid by the buyer.
because of the large furniture assembly, distribution problems, not the general arrival of goods quickly, can not specify a specific time delivery, the driver will be informed before the arrival of the day before you so that you do not have all day at home and other goods, so as not to waste you The precious time.
no recycling furniture service, for recycling furniture can contact the local cleaning team to recover, free shipping clearance line 0800-085-717
If you have any questions after receiving the goods, please contact us within 4 working days from the date of receipt of the goods and return it within seven days from the date of receipt of the goods in order to enjoy the After service.
If you do not return the status of this order, you purchase the goods invoice will receive the goods from seven to ten working days, please pay attention to the receipt box.
[post-purchase considerations]
The company is working from Monday to Friday 10: 00-18: 00, national holidays and other non-working hours to suspend online customer service, we still attach great importance to your valuable advice and any advice, we recommend that you can use the consultation form We will reply to you as soon as possible during working hours.
wake you, after each order is established, you can not manually change the details of the goods or merge orders, please be sure to confirm the order before the order details and order amount.
If you have any questions after receiving the goods, please contact us within 4 working days from the date of receipt of the goods and return it within seven days from the date of receipt of the goods in order to enjoy the After service.
If you do not return the status of this order, you purchase the goods invoice will receive the goods from seven to ten working days, please pay attention to the receipt box.
If you have any questions after receiving the goods, please contact us within 4 working days from the date of receipt of the goods and return it within seven days from the date of receipt of the goods in order to enjoy the After service.
If you do not return the status of this order, you purchase the goods invoice will receive the goods from seven to ten working days, please pay attention to the receipt box.