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Muto

Metal Parts

Metal Parts

59Clean Technology is an authorized distributor for Muto Technology's semiconductor-related products, including PVD and Etch. Committed to delivering competitive prices, we aim to assist our customers in achieving cost savings and improvement benefits. With a track record of supplying over 130 fabs worldwide.

OEM PN Part Description
0020-63124 300mm Cover Ring with Arc Spray
0020-27819 200mm Cover Ring
0240-20021 DC Bias/Clamp Ring Support Kit
0021-11747 200mm A101 Pedestal with Flat and Ears
0021-20106 200mm A101 Pedestal with Flat
0020-28937 200mm A101 Pedestal with Flat
0020-26588 200mm=8" Preclean Shield
0200-02863 DEP RING, 300MM SIP ENCORE TAN, CLEANCOAT
0020-24236 Antenna Spring Clip
0021-54083 Antenna Dowel
0020-22844 200mm=8" Preclean Pedestal Shield
0020-24531 Adapter Shield
0020-27190 200mm Upper Shield
0021-20114 200mm Upper Shield
0200-02677 12" Deposition Ring
0040-86514 300mm Lower Preclean Shield
0200-01903 300mm Insulator
0020-02348 300mm Sip Lower Shield Clamp
0020-45231 300mm Shutter with Arc Spray
0020-29711 300mm Lower Shield
0021-22177 300mm Cover Ring 
0021-24752 300mm Upper Shield
0020-24164 300mm Lower Shield with Side Holes Arc Spray
0020-28033 300mm Upper Shield with Arc Spray
0020-24166 300mm Cover Ring with Arc Spray
0040-51718 300mm Deposition Ring with Arc Spray
0020-29206 IMP Coil Support Bushing
0020-29306 IMP Feedthru Coil Support Outercup
0020-29143 IMP Coil Outer Cup Support
0021-22589 Captive Screw, IMP
3690-03177 8-32 x 1-1/4" SS SHCS, Silver Plated
3690-03970 8-32 x 1-1/8" SS SHCS, Silver Plated
0200-20169 IMP Insulator Coil Support
0200-20439 IMP Insulator Coil Support
0200-20175 IMP Labyrinth Rigid Coil Support
0200-20217 IMP Labyrinth Feedthru
0200-20215 Housing, Double RF Connectors, Vectra
0200-20170 IMP Coil Support Cap
0020-29975 Bar RF Connector. 12 Copper
0020-29974 Clamp Feedthru Coil Copper, Silver Plated
0021-22587 Nut, RF Connector 10-32, IMP
0200-01798 Lift Pin
0020-29344 200mm IMP Vectra Lower Shield 
0200-00299 Insulator Coil support 
0200-36631 Cover Plate, DXZ Patterned Heater
0200-10284 Lift Pin Ceramic
0020-25920 200mm Lower Shield
0020-23586 Adapter Shield
0020-28631 200mm Clamp Ring
0020-22510 200mm Clamp Ring 
0020-20113 DC Bias Assembly Hub
0020-23041 Clamp Shield
0020-27113 6' SMF calmp ring
0020-21462 Insulator Ceramic
0020-25744 shiled low 6 " g-12  101sst
0020-28420 PEDESTAL,6”AVD 101%, MAT:TI,HI-PWR
0020-28206 SHIELD, UPPER, 8” HI-PWR TTN, SCREWLESS 
0020-28205 COVER RING
0020-46072 COVER RING
0020-48628 300mm Edge Ring
0020-30678 150mm Clamp Ring 
0021-07905 200mm SIP Lower Shield  (CU Chamber)
0020-23044 200mm Lower Shield 
0020-23042 source adapter
0020-21665 Shield
0020-26823 150mm HTHU Lower Shield
0020-25059 CLAMP RING 6" AL SMF STRAIGHT FLAT
0020-26474 CLAMP RING  6 SMF AL FOUR PAD
0020-21468 CLAMP SHIELD 5 & 6"
3690-02569 SCR MACH FLT HD 6-32 X 1/2L SLOT TITAN
0020-21463 SHIELD AL/TI 6"
0020-24959 SHIELD AL/TI 6"
0015-20035 SCREW, INSULATOR
3690-02848 SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SST SLVR-PLT
3690-01869 SCR CAP SKT HD 4-40X1/4L HEX SKT SST SLVR-PLT
0020-29409 CONDUCTOR, FLEX DC BIAS
0020-20117 DC Bias Conducting Flex 
0020-20119 PAD DC BIAS
0020-21366 SCREW SHOULDER DC BIAS TIW
0020-20114 ISOLATOR, DC BIAS
0020-20126 STAND-OFF, CERAMIC DC BIAS 
3630-01091 RTNRRING EXT 3/4 SFT .062THKSST
3630-01092 RTNR RING INT 5/8 HSG .035THKSST
3880-01022 WSHRLKG SPLIT#4 .203OD X .120ID X .025THKSST 
3880-01004 WSHRFLAT #4 SST .031 THK
0020-26971 6" TI SHUTTER DISK
0020-28392 DISK 6" ADV 101 SHUTTER 
0020-22846 GAS TRENCH COVER
0200-20060 INSULATE
0200-20058 INSULATOR QTZ 6" JMF A PCII
0020-28938 PEDESTAL COVER 6" ADV 101 FULL COVERAGE 
0020-27122 PEDESTAL,PCII 6" JMF/SMF@A OR PCII W/CRYO
0020-26403 RING COVER 6" HTESC ALUM
0021-21900 RING DEPOSTION 150mm= 6" JMF ,9MM ALUM HTESC 
0020-26310 SHIELD  LOWER 6" CLMPD SPPRT LESS DURA
0020-24898 SHIELD 6" SST 101 AL
0020-26289 SHIELD LOWER 6" 101 DURA TTN
0020-22498 Upper Shield
0020-22499 200mm Lower Shield
0020-26547 200mm Clamp Ring with Tabs
0020-27702 200mm Clamp Ring, SNNF,3.4mm , 6 Pad
0021-01317 Outer Shield , TxZ 200MM 1
0200-20426 Non-antenna insulator
0200-02121 300mm RF feed thru insulator
0020-23043 SHILD TIN, UPPER 8 INCH WAFER
0020-23045 Lower Shield, 101% Tin Coverage
0020-24386 Cover Ring
0020-24365 Lower Shield
0021-16781 300mm SIP Upper Shield
0020-26374  300mm SIP Middle Shield Clamp
0020-08299 300mm SIP Middle Shield Clamp
0020-28207 SHIELD,LOWER,HI-PWR POIS TTN,A101,
0020-29015 RING,CLAMP RING.8"SNNF,SST,LOW ROOF,
0040-21528 COLLIMATOR,FOIL 5/8"HEX 1:1,SHAPED
0020-09716 Lift pin,
0021-15657 SHUTTER DISC MDP 300MM
0020-23278 Upper shield 
0020-23277 Lower shield
0021-20089 Upper Shield
0021-20090 Lower Shield
0200-00406 BUSHING, PREDESTAL RPC+
0020-26973 8” TI Shutter Disk
0020-20112 Ti Chamber Clamp Ring
0020-24913 101 pedestal 
0020-25731 Adapter Shiled
0020-28346 200mm clamp ring
0020-14847 Lower shield
0020-15016 Upper shield
0040-01549 Pedestal
0020-21900 200mm clamped lower shield (SS type)
0020-24614 SHIELD LOW KNEE AL/TI PRCS SST 6" WFR .2
0200-00624 RING PURGE 200MM WXZ+ NCSR
0020-22734 Honeycomb collimator 1/2 hex 
0020-23584 SHIELD UPPER 8" WAFER G-12
0020-27701 6" HTHU Clamp Ring
0020-22920 150mm=6" Preclean shield
0020-29348 IMP Feedthru Coil Support Outercup
0021-04229 8-32 X 1-1/8" Nitronic 60 Hex Socket Head Screw
0021-04230 8-32 X 1-1/4" Nitronic 60 Hex Socket Head Screw
3690-02977 6-32 x 5/16" SS SHCS, Silver Plated
3880-01166 #6 SS Flat Washer (.24" OD,.14" ID, .03" Thick)
3700-01170 2-388 Black Viton Target O-Ring, 300mm 
0200-20315 IMP Rest button (for B101 chamber type)
0020-27869 Pedestal  6" SMF
0020-06270 200mm SIP Inner Shield withArc Spray
0020-08673 200mm SIP Inner Shield withArc Spray
0020-27124 150mm Preclean Pedestal
0020-22909 150mm Preclean Pedestal Shield
0020-29202 Clamp ring SMF
0240-11789 KIT 101% REST BUTTONS TIN COATED
0020-22292 6" Lower Shield, AL
0020-22794 Upper Shield SST
0200-35486 PIN LIFT MOD 2
0020-42285 BLOCKER PLATE
0020-27116 SCREW
0020-26394 200mm Lower Shield with Arc Spray
0240-25480 A101 Hardware Kit
0020-29640 A101 Pedestal Rest Button
0020-26312 Upper Shield
0200-35611 Screw Lid Liner TxZ
0021-97309 DISK, SHUTTER, ESC, CENTER PIN, AL ARC SPRAY, ENDURA 2, 300MM
0020-02344 300mm SIP Lower Shield withArc Spray with Side Holes
0020-23549 300mm SIP Upper Shield with Arc Spray
0200-01389 300mm Deposition Ring
0021-17770 300mm Cover Ring with ArcSpray
0020-05810 IMP Copper Ring
0200-09450 Gas Feed Tube
0021-21234 SHIELD, UPPER HI-COND TIN LONG, 300MM PVD
0021-22064 COVER RING, TTN, 300MM PVD
0021-22065 SHIELD, LOWER HI-COND TTN, 300MM PVD
0040-07291 DEPOSITION RING ADV 101 300MM
0200-20492 INSULATOR, RCPT, RIGID SUPPORT, VECTRA-IMP ICE
0020-26216 SHIELD 6″ SST AL ARC 101 LOW KNEE
0240-20022 Shield Clamp Kits
0020-93157 CIP Encore Cover Ring
0020-21867 RF Bars
0020-27871 Clamp Ring Screw
0200-39140 Cersmic Ring, Focus, 200mm SEMI NOTCH DPS METAL
0020-23587 SPACER MODIF SHIELD 8"G-12
0020-05389 lift Pin
0040-06127 Shield Insert Inner, new
0021-03980 Outer shield w/o window  
0020-54777 Inner shield with arc spray
0020-02345 Inner shield with blasted
0200-22583 Coil support Bushing
0021-22583 Coil support Bushing
0200-02262 Insulator coil support
0200-02145 Cap, EB coil support
0200-23799 12" RF Bar (Ni Plated)
0200-24423 Retainer plate
0040-04586 SHIELD INNER, TXZ CVD 300MM
0200-02421 ISOLATOR, LID TOP CERAMIC, TXZ 300MM
0200-01041 200mm cover ring Arc-spray (LP) (OEM-LP)
0020-22852 Shield 200mm
3880-01836 #8 Inconel Belleville Washer
0020-26822 200mm Lower Shield HTHU
0200-00590 Bushing Upper Shield Upper Insu, SIP, Ceramic
0200-36630 8" Cover Plate Heater, DXZ, Aluminum NIT
0020-44974 CUP, OUTER, .125 THK, EB COIL, 300MM SIP, CLEANCOAT
0020-44976 SHIELD, OUTER, 300MM, SIP ENCORE TA(N), CLEANCOAT /WITH OR NO ARC SPRAY
0020-63125 DEP RING, CLAMPED, CLEANCOAT, 300MM ESC
0021-16782 SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM
0020-83706 SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM
0020-85755 SHIELD, LOWER, NARROW NECK, SIP CU, 300MM
0021-16287 SHIELD, LOWER, NARROW NECK, SIP CU, 300MM
0200-04017 RING, DEPOSITION, NARROW OD, EXTENDED TRENCH, 300M
0200-20285 PEDESTAL COVER UPPER 8"B101 VECTRA-IMP CERAMIC
0200-20331 COVER RING 8" B101 CERAMIC, 10.75" OD
0200-36105 CERAMIC INSERT
0021-22311 SHIELD 13" SRC, 6" 101, SST
0200-20494 CAP, RIGID COIL SUPPORT, VECTRA-IMP ICE
0021-17725 SHUTTER DISK,SNNF ESC,200MM SIP TA(N),KACHINA 1100 RA TWAS,Ta PK,0021-17725 Ta
0020-19708 cover ring,200MM SIP TA(N),TI,KACHINA 1100 RA TWAS,Ta PK,0020-19708 Ta
0021-23331 SHIELD,OUTER,SIP II 200MM,Ta PK,0021-23331 Ta
0021-23332 SHIELD,UPPER,STRAIGHT,SIP II 200MM,Ta PK,0021-23332 Ta
0021-23330 SHIELD,INNER SBSEB3 SIP ENCORE TA(N),0021-23330  /200mm Encore Inner Shield
0021-20572 PEDESTAL,150mm=6" ADV.101 FULL CVRG (A101 pedestal)
0021-02469 TxZ pumping port-->Exhaust Liner Insert, TxZ
0021-24811 TxZ pumping port-->Exhaust Liner Insert, TxZ
0020-24962 SHIELD LOW KNEE AL/TI PRCS SST 200mm=8" WFR(screw hole side no b-blast)
0020-22647 Shield coherent upper 11.3''  (AL, arc spray)
0020-08677 Upper Gnd Shield
0020-08674 200mm SIP Lower Shield with Arc Spray
0020-25670 Shield, 200MM SRC  (shield is for 150mm wafers, clamped ring type lower shield)
0020-23396 Lower Shield, 200MM
0200-20437 Dep ring
0200-02114 Ceramic RF Housing
0020-25077 SHIELD LOWER 8" 101G-12 SST 
3690-01884 Clamp Screw, Shield, Inner,
300mm SIP Encore TA(N) 10-24 x 1/2" SHCS - Silver Coated (TKM Screw)
0020-24332 SCR CAP SKT HD 8-32X7/8"L HEX SKT NITRON
0020-23799 BAR, RF SBS, 300MM SIP ENCORE TA(N)
0020-22975 Insulator TiN 8" wafer = 200mm sourcing ring
0020-22982 G12 TiN source adapter, assy
0040-55456 BELLJAR, 21 OD 300MM PC XT/XTE
0021-04258 PLATE, RETAINER ALUMINUM
0021-07745 SCRCAP SKT HD 8-32X5/8"L TORX SKT NITRONIC 60
0021-07747 SCRW,CAPTIVE,RF FT,1/4"-20 TORX HD,VCTR IMP,300MM
3690-01085 SCRCAP SKT HD 6-32 X 3/8L HEX SKT SST
3690-01914 SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST SLVRPLT (Sliver coated)
0020-26583 6" Shutter Disk
0020-26589 150mm PCII shield
0020-24018 Pin Antenna
0020-24706 cover ring
0020-21893 Lower Shield
0020-26399 200mm Lower Shield(Blasted/Arc spray low profile/Arc spray high profile)
0020-26288 200mm Lower Shield (screw hole 4.1mm NO b-blasted type with 8 point height QC data)
0020-29431 CLAMP RING, 8 SNNF, SST, E/E 2.54MM
0020-03636  Vespel screw
0021-20788 SHIELD, 8", 101% AL COVERAGE, 200MM
0200-02420 200mm Dep ring
0021-15555 200mm dep Ring
0020-24804 200mm ESC Cover Ring
0020-27205 200mm hot al chamber clamp ring
0200-36638 SHIELD, 8" 200MM/200 mm quartz Blade
0021-16783 Cover Ring / COVER RING, NARROW POCKET, 300MM SIP CU, REV 2.0
0021-21444 200mm SiP Upper Shield
0021-18436 200mm Cover ring
0020-25730 200mm Upper Shield
0021-26609 Shutter Disc/SHUTTER DISK, A101, TTN, CENTER PIN, BLUE, 300MM
0021-20718 PEDESTAL COVER LOWER 8”B101 REV 2.1 SST
0021-20437 DISK 8”B101 TI SHUTTER
0020-29343 SHIELD CLAMP,DARKSPACE .727”TALL VECTRA-IMP
0040-21178 PRECLEAN II BELL JAR SERIALIZED
0040-20561 PRECLEAN II BELL JAR SERIALIZED
0200-00218 COVER TOP QUARTZ 8" PCII
0200-00221 INSULATOR, PINLESS 8" SNNF, PRECLEAN II
0020-24914 COVER RING
0010-21717 ASSY SHIELD 6" ADV-101 TIN VECTRA-IMP (no coil)
0020-06265 200mm Shield
0021-14847 200mm Shield
0021-21589 200mm Shield
0020-26254 Insulator
0020-23579 300mm Encore Lower Shield with Arc Spray
0020-29525 cup outer 
0021-06336 Shutter disc 
0200-02812 Dep ring 
0020-29345 150mm Imp Vectra lower shield
0020-02537 Lower SIP SHIELD 6"

Attachment download:

※ If you have any requirements, please contact our staff for more information. 

Related Products

FreightDescription
Freight notes

[Shipping Description]

Within two days after receipt of the order (excluding the holidays), the Commissioner will confirm the order with your Union or SMS.

This product is non-DIY goods, 4 floor below the floor fee, 5 floor above each additional 200 yuan, no recovery services.

Delivery area: Taiwan Island, the outer island does not receive a single. Due to special restrictions (mountain, township, town, village), the stairs are too small to move upstairs and other factors, leading to the delivery, the company has the right to ship.

large furniture distribution is not easy, delivery time to 7 to 14 working days, before delivery logistics company will confirm with you delivery time.

Hualien area (except Hualien City), Taitung area, Pingtung (except Pingtung City) and some remote areas (mountain) area, you need to receive additional freight, travel less delivery of about 10 to 20 Working days, remote areas determined by the logistics company. (You can order the order, follow up by the commissioner and your offer)

To protect the work of the logistics staff, the seller does not provide hanging service, if the crane or other hanging way lifting, the cost will be paid by the buyer.

because of the large furniture assembly, distribution problems, not the general arrival of goods quickly, can not specify a specific time delivery, the driver will be informed before the arrival of the day before you so that you do not have all day at home and other goods, so as not to waste you The precious time.

no recycling furniture service, for recycling furniture can contact the local cleaning team to recover, free shipping clearance line 0800-085-717

If you have any questions after receiving the goods, please contact us within 4 working days from the date of receipt of the goods and return it within seven days from the date of receipt of the goods in order to enjoy the After service.

If you do not return the status of this order, you purchase the goods invoice will receive the goods from seven to ten working days, please pay attention to the receipt box.


[post-purchase considerations]

The company is working from Monday to Friday 10: 00-18: 00, national holidays and other non-working hours to suspend online customer service, we still attach great importance to your valuable advice and any advice, we recommend that you can use the consultation form We will reply to you as soon as possible during working hours.

wake you, after each order is established, you can not manually change the details of the goods or merge orders, please be sure to confirm the order before the order details and order amount.

If you have any questions after receiving the goods, please contact us within 4 working days from the date of receipt of the goods and return it within seven days from the date of receipt of the goods in order to enjoy the After service.

If you do not return the status of this order, you purchase the goods invoice will receive the goods from seven to ten working days, please pay attention to the receipt box.

If you have any questions after receiving the goods, please contact us within 4 working days from the date of receipt of the goods and return it within seven days from the date of receipt of the goods in order to enjoy the After service.

If you do not return the status of this order, you purchase the goods invoice will receive the goods from seven to ten working days, please pay attention to the receipt box.